<?xml version="1.0" encoding="UTF-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">tuzsut</journal-id><journal-title-group><journal-title xml:lang="ru">Труды учебных заведений связи</journal-title><trans-title-group xml:lang="en"><trans-title>Proceedings of Telecommunication Universities</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1813-324X</issn><issn pub-type="epub">2712-8830</issn><publisher><publisher-name>СПбГУТ</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.31854/1813-324X-2021-7-1-31-40</article-id><article-id custom-type="elpub" pub-id-type="custom">tuzsut-150</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>ПРИБОРОСТРОЕНИЕ, МЕТРОЛОГИЯ И ИНФОРМАЦИОННО-ИЗМЕРИТЕЛЬНЫЕ ПРИБОРЫ И СИСТЕМЫ</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>INSTRUMENTATION, METROLOGY AND INFORMATION-MEASURING DEVICES AND SYSTEMS</subject></subj-group></article-categories><title-group><article-title>Подходы к снижению потерь на рассеяние излучения в полимерных планарных  оптических волновода</article-title><trans-title-group xml:lang="en"><trans-title>The Reducing Approaches of Scattering Losses  in Polymer Planar Optical Waveguides</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-6360-810X</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Радзиевская</surname><given-names>Т. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Radzievskaya</surname><given-names>Т.</given-names></name></name-alternatives><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-8511-8494</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Иванов</surname><given-names>Н. Н.</given-names></name><name name-style="western" xml:lang="en"><surname>Ivanov</surname><given-names>N.</given-names></name></name-alternatives><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-6321-0019</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Тарасов</surname><given-names>С. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Tarasov</surname><given-names>S.</given-names></name></name-alternatives><xref ref-type="aff" rid="aff-3"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru">Санкт-Петербургский государственный электротехнический университет «ЛЭТИ» имени В.И. Ульянова (Ленина); ОАО «Авангард»<country>Россия</country></aff><aff xml:lang="en">Saint-Petersburg Electrotechnical University "LETI"; JSC «Avangard»<country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru">Санкт-Петербургский государственный университет телекоммуникаций им. проф. М.А. Бонч-Бруевича<country>Россия</country></aff><aff xml:lang="en">The Bonch-Bruevich Saint-Petersburg State University of Telecommunications<country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-3"><aff xml:lang="ru">Санкт-Петербургский государственный электротехнический университет «ЛЭТИ» имени В.И. Ульянова (Ленина)<country>Россия</country></aff><aff xml:lang="en">Saint-Petersburg Electrotechnical University "LETI"<country>Russian Federation</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2021</year></pub-date><pub-date pub-type="epub"><day>18</day><month>04</month><year>2021</year></pub-date><volume>7</volume><issue>1</issue><fpage>31</fpage><lpage>41</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Радзиевская Т.А., Иванов Н.Н., Тарасов С.А., 2021</copyright-statement><copyright-year>2021</copyright-year><copyright-holder xml:lang="ru">Радзиевская Т.А., Иванов Н.Н., Тарасов С.А.</copyright-holder><copyright-holder xml:lang="en">Radzievskaya Т., Ivanov N., Tarasov S.</copyright-holder><license license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://tuzs.sut.ru/jour/article/view/150">https://tuzs.sut.ru/jour/article/view/150</self-uri><abstract><p> В статье рассмотрены перспективы использования полимерных материалов для создания планарных оптических волноводов оптико-электронных шин высокоскоростных систем передачи данных. Выявлены преимущества и недостатки использования неспециализированных полимерных материалов общего применения. Предложены технологии изготовления полимерных планарных оптических волноводов. Определены основные типы потерь в планарных оптических волноводах, причины их возникновения, а также подходы к их сокращению. На примере полимера PDMS и технологии мягкой литографии отмечены критические этапы технологического процесса изготовления полимерных планарных оптических волноводов, которые способствуют возрастанию потерь на рассеяние. Для каждого этапа предложены алгоритмы предотвращения увеличения потерь на рассеяние. Данные алгоритмы были реализованы на практике при изготовлении макетов полимерных планарных оптических волноводов оптико-электронной шины передачи данных. </p></abstract><trans-abstract xml:lang="en"><p> The article presents the development prospects of planar optical waveguides for high-speed data transmission systems optoelectronic buses by polymer materials. The advantages and disadvantages of using nonspecialized polymeric materials for general use are revealed. The polymer planar optical waveguides fabrication technologies are proposed. The main losses types in planar optical waveguides, the reasons for their occurrence, as well as approaches to their reduction are determined. Using the example of PDMS polymer and soft lithography technology, the technological process critical stages of polymer planar optical waveguides production are noted, which contribute to an scattering losses increase. For each stage, algorithms are proposed to prevent an scattering losses increase. These algorithms were implemented in practice in the manufacture of layouts of polymer planar optical waveguides of the optical-electronic data transmission bus. </p></trans-abstract><kwd-group xml:lang="ru"><kwd>полимерные планарные оптические волноводы</kwd><kwd>оптико-электронная шина передачи данных</kwd><kwd>мягкая литография</kwd><kwd>мастер-штамп</kwd><kwd>адгезия</kwd></kwd-group><kwd-group xml:lang="en"><kwd>PDMS</kwd><kwd>SU-8</kwd><kwd>T-topping</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Ахманов А.С. Оптическая передача информации в супер-ЭВМ и микропроцессорных системах. Часть 1 // LIGHTWAVE. 2008. № 3. С. 46‒53.</mixed-citation><mixed-citation xml:lang="en">Ahmanov A.S. Optical Transmission of Information in Super-Computers and Microprocessor Systems. Part 1. LIGHTWAVE. 2008;3:46‒53. (in Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">Copper versus optical: The battle begins // VITA Technologies. URL: http://vita.mil-embedded.com/articles/copperversus-optical-battle-begins (дата обращения 20.10.2020)</mixed-citation><mixed-citation xml:lang="en">VITA Technologies. Copper versus optical: The battle begins. Available from: http://vita.mil-embedded.com/articles/ copper-versus-optical-battle-begins [Accessed 20th October 2020]</mixed-citation></citation-alternatives></ref><ref id="cit3"><label>3</label><citation-alternatives><mixed-citation xml:lang="ru">Bamiedakis N., Hashim A., Penty R.V., White H. Regenerative polymeric bus architecture for board-level optical interconnects // Optics Express. 2012. Vol. 20. Iss. 11. PP. 11625‒11636. DOI:10.1364/OE.20.011625</mixed-citation><mixed-citation xml:lang="en">Bamiedakis N., Hashim A., Penty R.V., White H. Regenerative polymeric bus architecture for board-level optical interconnects. Optics Express. 2012;20(11):11625‒11636. DOI:10.1364/OE.20.011625</mixed-citation></citation-alternatives></ref><ref id="cit4"><label>4</label><citation-alternatives><mixed-citation xml:lang="ru">Schares L., Kash J.A., Doany F.E., Schow C.L., Schuster C., Kuchta D.M. Terabus: Terabit/Second-Class Card-Level Optical Interconnect Technologies // IEEE Journal of Selected Topics in Quantum Electronics. 2006. Vol. 12. Iss.</mixed-citation><mixed-citation xml:lang="en">Schares L., Kash J.A., Doany F.E., Schow C.L., Schuster C., Kuchta D.M. Terabus: Terabit/Second-Class Card-Level Optical Interconnect Technologies. IEEE Journal of Selected Topics in Quantum Electronics. 2006;12(5):1032–1044. DOI:10.1109/ JSTQE.2006.881906</mixed-citation></citation-alternatives></ref><ref id="cit5"><label>5</label><citation-alternatives><mixed-citation xml:lang="ru">PP. 1032–1044. DOI:10.1109/JSTQE.2006.881906 5. Immonen M., Wu J., Yan H.J., Zhu L.X., Chen P., Rapala-Virtanen T. Development of electro-optical PCBs with embedded waveguides for data center and high performance computing applications // Proceedings of SPIE OPTO (San Francisco, USA, 1‒6 February 2014). Vol. 8991. Optical Interconnects XIV. 2014. DOI:10.1117/12.2039875</mixed-citation><mixed-citation xml:lang="en">Immonen M., Wu J., Yan H.J., Zhu L.X., Chen P., Rapala-Virtanen T. Development of electro-optical PCBs with embedded waveguides for data center and high performance computing applications. Proceedings of SPIE OPTO, 1‒6 February 2014, San Francisco, USA. Vol. 8991. Optical Interconnects XIV. 2014. DOI:10.1117/12.2039875</mixed-citation></citation-alternatives></ref><ref id="cit6"><label>6</label><citation-alternatives><mixed-citation xml:lang="ru">Соколов В.И., Ахманов А.С., Китай М.С., Молчанова С.И., Панченко В.Я., Троицкая Е.В. и др. Лазерные технологии формирования полимерных элементов микро и нанофотоники для высокоскоростных информационных систем. URL: http://shatura.laser.ru/laser.ru/30/Polymer_photonics.pdf (дата обращения 05.05.2020)</mixed-citation><mixed-citation xml:lang="en">Sokolov V.I., Ahmanov A.S., Kitaj M.S., Molchanova S.I., Panchenko V.Ya., Troitskaya E.V. Laser Technologies for the Formation of Polymer Elements of Micro and Nanophotonics for High-Speed Information Systems. Available from: http://shatura.laser.ru/laser.ru/30/Polymer_photonics.pdf [Accessed 5th May 2020). (in Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit7"><label>7</label><citation-alternatives><mixed-citation xml:lang="ru">Ахманов А.С. Оптическая передача информации в супер-ЭВМ и микропроцессорных системах. Часть 2 // LIGHTWAVE. 2008. № 4. С. 52‒55.</mixed-citation><mixed-citation xml:lang="en">Ahmanov A.S. Optical Transmission of Information in Super-Computers and Microprocessor Systems. Part 2. LIGHTWAVE. 2008;4:52‒55. (in Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit8"><label>8</label><citation-alternatives><mixed-citation xml:lang="ru">Zhu L.X., Immonen M., Wu J., Yan H.J., Ruizhi S., Peifeng C., et al. Electro-optical line cards with multimode polymer waveguides for chip-to-chip interconnects // Proceedings of SPIE/COS Photonics Asia (Beijing, China, 9‒11 October 2014). Vol. 9270. Optoelectronic Devices and Integration V. 2014. DOI:10.1117/12.2071965</mixed-citation><mixed-citation xml:lang="en">Zhu L.X., Immonen M., Wu J., Yan H.J., Ruizhi S., Peifeng C., et al. Electro-optical line cards with multimode polymer waveguides for chip-to-chip interconnects. Proceedings of SPIE/COS Photonics Asia, 9‒11 October 2014, Beijing, China. Vol. 9270. Optoelectronic Devices and Integration V. 2014. DOI:10.1117/12.2071965</mixed-citation></citation-alternatives></ref><ref id="cit9"><label>9</label><citation-alternatives><mixed-citation xml:lang="ru">Karppinen M., Mäkinen J.-T., Kataja K., Tanskanen A., Alajoki T., Karioja P., et all. Embedded optical interconnect on printed wiring board // Proceedings of Photonics Europe (Strasbourg, France, 26‒30 April 2004). Vol. 5453. Micro-Optics, VCSELs, and Photonic Interconnects. 2004. PP. 150‒164. DOI:10.1117/12.545931</mixed-citation><mixed-citation xml:lang="en">Karppinen M., Mäkinen J.-T., Kataja K., Tanskanen A., Alajoki T., Karioja P., et all. Embedded optical interconnect on printed wiring board. Proceedings of Photonics Europe, 26‒30 April 2004, Strasbourg, France. Vol. 5453. Micro-Optics, VCSELs, and Photonic Interconnects. 2004. p.150‒164. DOI:10.1117/12.545931</mixed-citation></citation-alternatives></ref><ref id="cit10"><label>10</label><citation-alternatives><mixed-citation xml:lang="ru">Karppinen M., Alajoki T., Tanskanen A., Kataja K., Mäkinen J.-T., Karioja P. , et all. Parallel optical interconnect between surface-mounted devices on FR4 printed wiring board using embedded waveguides and passive optical alignments // Proceedings of SPIE Photonics Europe (Strasbourg, France, 3‒7 April 2006). Vol. 6185. Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration. 2006. DOI:10.1117/12.664386</mixed-citation><mixed-citation xml:lang="en">Karppinen M., Alajoki T., Tanskanen A., Kataja K., Mäkinen J.-T., Karioja P. , et all. Parallel optical interconnect between surface-mounted devices on FR4 printed wiring board using embedded waveguides and passive optical alignments. Proceedings of SPIE Photonics Europe, 3‒7 April 2006, Strasbourg, France. Vol. 6185. Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration. 2006. DOI:10.1117/12.664386</mixed-citation></citation-alternatives></ref><ref id="cit11"><label>11</label><citation-alternatives><mixed-citation xml:lang="ru">Chen S., Pang F., Li K., Wu J., Immonen M., Zhang X., et al. Long distance optical printed circuit board for 10Gbps optical interconnection // Proceedings of Photonics Asia (Beijing, China, 5‒7 November 2012). Vol. 8555. Optoelectronic Devices and Integration IV. 2012. DOI:10.1117/12.999969</mixed-citation><mixed-citation xml:lang="en">Chen S., Pang F., Li K., Wu J., Immonen M., Zhang X., et al. Long distance optical printed circuit board for 10Gbps optical interconnection. Proceedings of Photonics Asia, 5‒7 November 2012, Beijing, China. Vol. 8555. Optoelectronic Devices and Integration IV. 2012. DOI:10.1117/12.999969</mixed-citation></citation-alternatives></ref><ref id="cit12"><label>12</label><citation-alternatives><mixed-citation xml:lang="ru">Zgraggen E. Fabrication and System Integration of Single-Mode Polymer Optical Waveguides. D.Sc. Thesis. Zurich: ETH, 2014. 158 р.</mixed-citation><mixed-citation xml:lang="en">Zgraggen E. Fabrication and System Integration of Single-Mode Polymer Optical Waveguides. D.Sc. Thesis. Zurich: ETH; 2014. 158 р.</mixed-citation></citation-alternatives></ref><ref id="cit13"><label>13</label><citation-alternatives><mixed-citation xml:lang="ru">Cai D. Optical and Mechanical Aspects on Polysiloxane Based Electrical-Optical-Circuits-Board. D.Sc. Thesis. Dortmund: TU Dortmund University, 2008. 129 р. DOI:10.17877/DE290R-8242</mixed-citation><mixed-citation xml:lang="en">Cai D. Optical and Mechanical Aspects on Polysiloxane Based Electrical-Optical-Circuits-Board. D.Sc. Thesis Dortmund: TU Dortmund University; 2008. 129 р. DOI:10.17877/DE290R-8242</mixed-citation></citation-alternatives></ref><ref id="cit14"><label>14</label><citation-alternatives><mixed-citation xml:lang="ru">Ma H., Jen A.K.-Y., Dalton L.R. Polymer-Based Optical Waveguides: Materials, Processing, and Devices // Advanced Materials. 2002. Vol. 14. Iss. 19. PP. 1339‒1365. DOI:10.1002/1521-4095(20021002)14:19&lt;1339::AID-ADMA1339&gt;3.0.CO;2-O</mixed-citation><mixed-citation xml:lang="en">Ma H., Jen A.K.-Y., Dalton L.R. Polymer-Based Optical Waveguides: Materials, Processing, and Devices. Advanced Materials. 2002;14(19):1339‒1365. DOI:10.1002/1521-4095(20021002)14:19&lt;1339::AID-ADMA1339&gt;3.0.CO;2-O</mixed-citation></citation-alternatives></ref><ref id="cit15"><label>15</label><citation-alternatives><mixed-citation xml:lang="ru">Sergeeva E. Fabrication of polymer-based optofluidic microsystems for optical fluid analysis on printed circuit boards. D.Sc. Thesis. Rostock: University of Rostock, 2019. 143 p.</mixed-citation><mixed-citation xml:lang="en">Sergeeva E. Fabrication of polymer-based optofluidic microsystems for optical fluid analysis on printed circuit boards. D.Sc. Thesis. Rostock: University of Rostock; 2019. 143 p.</mixed-citation></citation-alternatives></ref><ref id="cit16"><label>16</label><citation-alternatives><mixed-citation xml:lang="ru">Miller S.E. Integrated Optics: An Introduction // Bell System Technical Journal. 1969. Vol. 48. Iss. 7. PP. 2059‒2069. DOI:10.1002/j.1538-7305.1969.tb01165.x</mixed-citation><mixed-citation xml:lang="en">Miller S.E. Integrated Optics: An Introduction. Bell System Technical Journal. 1969;48(7):2059‒2069. DOI:10.1002/ j.1538-7305.1969.tb01165.x</mixed-citation></citation-alternatives></ref><ref id="cit17"><label>17</label><citation-alternatives><mixed-citation xml:lang="ru">Cai D. Polydimethylsiloxane (PDMS) based optical interconnect with copper-clad FR4 substrates // Sensors and Actuators B: Chemical. 2011. Vol. 160. Iss. 1. PP. 777‒783. DOI:10.1016/j.snb.2011.08.062</mixed-citation><mixed-citation xml:lang="en">Cai D. Polydimethylsiloxane (PDMS) based optical interconnect with copper-clad FR4 substrates. Sensors and Actuators B: Chemical. 2011;160(1):777‒783. DOI:10.1016/j.snb.2011.08.062</mixed-citation></citation-alternatives></ref><ref id="cit18"><label>18</label><citation-alternatives><mixed-citation xml:lang="ru">Immonen M. Fabrication and Characterization of Polymer Optical Waveguides With Integrated Micromirrors for ThreeDimensional Board-Level Optical Interconnects // IEEE Transactions on Electronics Packaging Manufacturing. 2005. Vol. 28. Iss. 4. PP. 304–311. DOI:10.1109/TEPM.2005.856538</mixed-citation><mixed-citation xml:lang="en">Immonen M. Fabrication and Characterization of Polymer Optical Waveguides With Integrated Micromirrors for ThreeDimensional Board-Level Optical Interconnects. IEEE Transactions on Electronics Packaging Manufacturing. 2005;28(4):304– 311. DOI:10.1109/TEPM.2005.856538</mixed-citation></citation-alternatives></ref><ref id="cit19"><label>19</label><citation-alternatives><mixed-citation xml:lang="ru">Prajzler V., Neruda M., Nekvindova P., Mikulik P. Properties of Multimode Optical Epoxy Polymer Waveguides Deposited on Silicon and TOPAS Substrate // Radioengineering. 2017. Vol. 26. No. 1. PP. 10‒15. DOI:10.13164/re.2017.0010</mixed-citation><mixed-citation xml:lang="en">Prajzler V., Neruda M., Nekvindova P., Mikulik P. Properties of Multimode Optical Epoxy Polymer Waveguides Deposited on Silicon and TOPAS Substrate. Radioengineering. 2017;26(1):10‒15. DOI:10.13164/re.2017.0010</mixed-citation></citation-alternatives></ref><ref id="cit20"><label>20</label><citation-alternatives><mixed-citation xml:lang="ru">Иванов Н.Н., Радзиевская Т.А. Конвергенция технологий фотоники и радиоэлектроники при создании высокоскоростных шин передачи данных // IX Международная научно-технической и научно-методической конференции «Актуальные проблемы инфотелекоммуникаций в науке и образовании» (Санкт-Петербург, Россия, 26–27 февраля 2020). СПб: СПбГУТ, 2020. Т. 1. С. 510‒514.</mixed-citation><mixed-citation xml:lang="en">Ivanov N.N., Radzievskaja T.A. Convergence of Photonics and Radio Electronics Technologies in the Creation of HighSpeed Data Transmission Buses. Proceedings of the IXth International Conference on Infotelecommunications in Science and Education, 26‒27 February 2020, St. Petersburg, Russia. St. Petersburg: The Bonch-Bruevich Saint-Petersburg State University of Telecommunications Publ.; 2020, vol.1. p.510‒514. (in Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit21"><label>21</label><citation-alternatives><mixed-citation xml:lang="ru">Zhou W. Principles and Status of Nanoimprint Lithography // Nanoimprint Lithography: An Enabling Process for Nanofabrication. Berlin, Heidelberg: Springer, 2013. 269 p. DOI:10.1007/978-3-642-34428-2</mixed-citation><mixed-citation xml:lang="en">Zhou W. Principles and Status of Nanoimprint Lithography. In: Nanoimprint Lithography: An Enabling Process for Nanofabrication. Berlin, Heidelberg: Springer; 2013. 269 p. DOI:10.1007/978-3-642-34428-2</mixed-citation></citation-alternatives></ref><ref id="cit22"><label>22</label><citation-alternatives><mixed-citation xml:lang="ru">Chang-Yen D.A., Eich R.K., Gale B.K. A Monolithic PDMS Waveguide System Fabricated Using Soft-Lithography Techniques // Journal of Lightwave Technology. 2005. Vol. 23. Iss. 6. PP. 2088‒2093. DOI:10.1109/JLT.2005.849932</mixed-citation><mixed-citation xml:lang="en">Chang-Yen D.A., Eich R.K., Gale B.K. A Monolithic PDMS Waveguide System Fabricated Using Soft-Lithography Techniques. Journal of Lightwave Technology. 2005;23(6):2088‒2093. DOI:10.1109/JLT.2005.849932</mixed-citation></citation-alternatives></ref><ref id="cit23"><label>23</label><citation-alternatives><mixed-citation xml:lang="ru">Cai Z., Qiu W., Shao G., Wang W. A new fabrication method for all-PDMS waveguides // Sensors and Actuators A: Physical. 2013. Vol. 204. PP. 44‒47. DOI:10.1016/j.sna.2013.09.019</mixed-citation><mixed-citation xml:lang="en">Cai Z., Qiu W., Shao G., Wang W. A new fabrication method for all-PDMS waveguides. Sensors and Actuators A: Physical. 2013;204:44‒47. DOI:10.1016/j.sna.2013.09.019</mixed-citation></citation-alternatives></ref><ref id="cit24"><label>24</label><citation-alternatives><mixed-citation xml:lang="ru">Madou M.J. Fundamentals of Microfabrication and Nanotechnology. Irvine: CRC Press, 2011. 1992 p. DOI:10.1201/ 9781315274164</mixed-citation><mixed-citation xml:lang="en">Madou M.J. Fundamentals of Microfabrication and Nanotechnology. Irvine: CRC Press; 2011. 1992 p. DOI:10.1201/ 9781315274164</mixed-citation></citation-alternatives></ref><ref id="cit25"><label>25</label><citation-alternatives><mixed-citation xml:lang="ru">Mitra S.K. Microfluidics and nanofluidics handbook: Fabrication, implementation, and applications. Irvine: CRC Press, 2011. 624 p. DOI:10.1201/b11188</mixed-citation><mixed-citation xml:lang="en">Mitra S.K. Microfluidics and nanofluidics handbook: Fabrication, implementation, and applications. Irvine: CRC Press; 2011. 624 p. DOI:10.1201/b11188</mixed-citation></citation-alternatives></ref><ref id="cit26"><label>26</label><citation-alternatives><mixed-citation xml:lang="ru">SU-8 3000 Permanent epoxy negaive photoresist (Data Sheet) // MicroChem. URL: http://microchem.com/pdf/SU8%203000%20Data%20Sheet.pdf (дата обращения 20.10.2020)</mixed-citation><mixed-citation xml:lang="en">MicroChem. SU-8 3000 Permanent epoxy negaive photoresist (Data Sheet). Available from: http://microchem.com/ pdf/SU-8%203000%20Data%20Sheet.pdf [Accessed 20th October 2020]</mixed-citation></citation-alternatives></ref><ref id="cit27"><label>27</label><citation-alternatives><mixed-citation xml:lang="ru">Manvelova T.A. Polymer Optoelectronic Bus for High-Speed Data Transmission Systems // Journal of Physics: Conference Series. 2019. Vol. 1400. Iss. 6. DOI:10.1088/1742-6596/1400/6/066051</mixed-citation><mixed-citation xml:lang="en">Manvelova T.A. Polymer Optoelectronic Bus for High-Speed Data Transmission Systems. Journal of Physics: Conference Series. 2019;1400(6). DOI:10.1088/1742-6596/1400/6/066051</mixed-citation></citation-alternatives></ref></ref-list><fn-group><fn fn-type="conflict"><p>The authors declare that there are no conflicts of interest present.</p></fn></fn-group></back></article>
